Graded TiN Coating by Supersonic Free-Jet PVD Combined with Reactive Plasma
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چکیده
منابع مشابه
Oleophobic optical coating deposited by magnetron PVD
Thin oxinitride films of Zn-Sn-O-N and Si-Al-O-N were deposited on glass by reactive magnetron sputtering at various nitrogen-to-oxygen ratios. Nitrogen added to oxygen led to decrease of the surface roughness and increase of oleophobic properties studied by the oil-drop test. The best oleophobity was obtained for Zn-Sn-O-N oxinitride at Zn:Sn=1:1 and N:O=1:2. Improved oleophobic properties wer...
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ژورنال
عنوان ژورنال: MATERIALS TRANSACTIONS
سال: 2002
ISSN: 1345-9678,1347-5320
DOI: 10.2320/matertrans.43.2932